Used NEXTorr D 100-5 Saes Getters Compact Gas ION Pump

Description

NEXTorr D 100-5 is an extremely compact pump able to sorb gases very effectively and with large capacity down to the XHV level. The getter cartridge is made of porous sintered getter disks (St 172) stacked in a highly efficient gas trapping structure featuring pumping speed in excess of 100 l/s (H2). The cartridge is integrated into a CF 35 flange containing a heating element for the getter activation. After the activation is carried out (500°C x 1 h), the pump removes gases at room temperature without any need for electric power to operate. On the other side of the same flange, a diode ion pump featuring 6 l/s (Ar) is connected. Gas flows from the vacuum system to the ion pump through an optimized conductance. The optimized conductance and the special internal design of the ion pump allow the maximum exploitation of the ion pump sorption performance. The configuration of the ion pump with respect to the getter cartridge provides additional pumping synergies. Gases released by the ion pump during the operation, are intercepted and removed by the getter element, with a substantial reduction of backstreaming effects. For the same reasons, increased pumping efficiency for H2 and CH4 are obtained. Fine titanium particles which are known to be continuously emitted by ion pumps during operation are also effectively trapped by the getter element, reducing potential contamination of the vacuum system.